Business

Smart Automation Leader - DrimSys

Business Performance

[2017] Equipment Health monitoring and interpretationg system advancement

TTTM (Tool To Tool Matching)
By combining various data (Source Parameter, Tool Alram, Event, Log, Yield, measurement data, etc.) provided by the equipment with production data, it is possible to stabilize the productivity of the equipment by stable operation of the equipment, Contribution to improve product yield.




  • System
    • System Integrated Service