System

Smart Automation Leader - DrimSys

Environment data collection

Overview

Equipped with an environment sensor (temperature, humidity, differential pressure, dust, vibration, etc.) within a semiconductor FOUP, this is used to collect environment data by moving from equipment to equipment, connect the collected data with an upper system, and realize its automation.

Feature

  • Possible to equip additional sensors if required by customers.
  • Possible to use it for 12 hours with just a single charge.
  • Possible to precisely measure it with an extremely sensitive sensor
  • Support various protocols such as SECS, EDA, Modubus, etc.

Related Product * Click the image below to a detailed page.

Reference

  • SK Hynix Novellus Equipment Baratron Guage Data Collection
  • Samsung Electronics NRD FAB Temperature / Humidity Monitoring
  • SK Hynix Sensor Data Collection in N2 Stocker

Application Client

  • Samsung Electronics
  • SK Hynix